Proforma 200SA Semi-Automated Measurement System
Do you need to perform process monitoring measurements quickly and accurately? Need a measurement system that can handle multiple wafer diameters and material types without extensive set-up changes? Need a portable, easy to use system that does it all? MTI Instruments has what you’re looking for.
The Proforma 200SA is capable of measuring thickness, TTV, bow, warp, sori and flatness at the click of a button. Its versatile design allows for wafer diameters from 75 mm. to 200 mm. without time consuming component changes. Simply select the diameter of the wafer to be measured and the Proforma 200SA does the rest. Based on MTII’s exclusive Push/Pull sensor technology, the 200SA delivers a high data density scan (8,000 points on a 200 mm. wafer) in less than 45 seconds. The Windows® – based control software allows for point and click set-up of measurement recipes quickly and easily. Three dimensional images for thickness, median surface, front surface, and before and after grinding/polishing are powerful tools for monitoring and adjusting your process. For offline, remote data analysis and machine set-up, MTII offers the powerful DataTools software package. This program adds the ability to view data at any PC across your network, allowing you to upload measurement recipes, re-calculate data based on changed measurement parameters and perform “what-if” engineering analysis all without having to re-scan your wafers.
Thickness and Shape Measurements of Non-Silicon Semiconductor Substrates
High brightness LEDs, next generation RF devices and space-based solar cells have two things in common: 1) They aren’t made on silicon substrates. 2) They are being measured on MTI Instruments semiconductor metrology systems. At MTI Instruments we recognize that the semiconductor market doesn’t just revolve around the latest generation 300 mm. wafer. That’s why we have worked with device and wafer manufacturers around the world supplying state of the art metrology systems for GaAs, SiC, GaN, AlInGaP and many other types wafer materials.
Laser System for Quality Control of Flat Panel Display Glass
It’s all perfectly clear. The HDTV revolution is in full swing and the latest generation of LCD and plasma displays make our old CRT’s look like the antiques that they are. As the FPD market advances, customers are demanding larger screens with crisper displays at lower prices. The need to manufacture higher quality FPD glass faster and cheaper became obvious. When a leading supplier of glass for FPD manufacturers throughout the world needed an inline sensor for glass thickness on their production line, they turned to MTI Instruments for help. MTII developed a revolutionary new laser sensor specifically for measuring glass thickness. Based on our Microtrak series of laser triangulation systems, the new glass thickness measurement gage provides sub-micron accurate measurements at frequency responses over 4 KHz.
Distributor Highlight: Koyo Precision Instruments – Tokyo, Japan
In order to provide first class sales, service and support worldwide, MTI Instruments Inc. has partnership agreements with distribution firms that specialize in servicing the semiconductor industry. In Japan, MTI Instruments has expanded its long term relationship with Koyo Precision Instruments to now include all of our semiconductor metrology systems. In addition to supplying the 24/7 equipment service and support our customers expect, Koyo has a fully equipped demonstration area that customers can visit to see all of the features of our tools, as well as, run their sample wafers and analyze data.
Learn more about Koyo Precision Instruments
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-The Team at MTI Instruments Inc.
sales@mtiinstruments.com
http://www.mtiinstruments.com