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Autoscan 200 Video
This video is recommended for dial-up connections

<p>MTI Instruments' AutoScan 200 is a fully automated, cassette-to-cassette system designed for wafer geometry measurements in high volume applications where reliability, accuracy and repeatability are critical. ASTM Test Methods and the decision trees outlined in the SEMI Materials Standards are used for measuring wafer thickness, total thickness variation, wafer shape, global flatness and site flatness. In addition to those measurements, the ability to determine wafer type, measure resistivity and analyze the stress that may be induced on the wafer by various process steps can be added to the system. The AutoScan's modular architecture makes it easy to implement configuration changes and upgrades.</p> <p>Wafer cassettes are scanned for empty slots and cross-slotted wafers prior to processing. The cassette plates can accommodate SEMI standard wafer carriers from 3 inch to 200mm without any mechanical adjustment. Sensors confirm the cassette size and compare it to wafer size in the recipe prior to starting a lot.</p> <p>The robot, chosen for its outstanding performance and reputation in our industry, handles the wafer movements between the cassettes and the process modules. Like the cassette plate, the robot end-effector was designed to be universal, making wafer size changes only a function of recipe selection.</p> <p>An optional optical character recognition module can be incorporated into the pre-aligner to read all SEMI standard alphanumeric and bar code characters. The information read from the wafers is then automatically entered into the wafer ID field of the data files.</p> <p>The measurement stage, field-proven in the semi-automated Proforma 200SA, utilizes MTI's patented Push/Pull capacitance technology that allows for measurement not only of silicon wafers, but also gallium arsenide, indium phosphide, germanium and silicon carbide. This unique technology is unaffected by surface conditions so as-cut, lapped, etched, polished and patterned wafers can all be measured successfully. Even taped wafers and wafers mounted to sapphire or quartz bases can be measured.</p> <p>The system can be configured with an optional resistivity gage, which, in addition to determining wafer type, provides bulk resistivity measurements without damaging your wafer.</p> <p>Sorting is possible using any parameter being measured as the criteria. A variety of sorting options allow you to tailor this function to meet your needs. Should an additional cassette be required, it can be added to the standard system.</p> <p>In applications where an extremely clean environment is crucial, an ULPA filter module can be integrated into the system. A Class 10,000 pre-filter followed by a Class 10 ULPA filter ensure that your wafers remain uncontaminated during the measurement process.</p> <p>The Windows 2000 based controller is powered by an advanced, high speed Intel Pentium processor. The operator interface is comprised of a large, flat screen active-matrix display along with a keyboard and mouse housed in a pull-out drawer. Serial, parallel and USB ports are provided in addition to the Ethernet network interface. An Iomega external zip drive is also supplied for data storage and back up capability.</p> <p>Multiple levels of security ensure appropriate access to the controller functions. Access can be restricted to allow measurement of wafers and calibration procedures for some operators, while more advanced users are able to do recipe editing, data management and manual operation of components for diagnostic purposes.</p> <p>System calibration is quickly and easily accomplished. In addition to the cassettes used for the wafers being measured, a separate cassette is designated exclusively for calibration standards. In the calibration mode, a particular standard is selected for use and automatically sent to the measurement stage, measured and returned to the calibration cassette. The entire operation is accomplished in under a minute.</p> <p>Recipes are created that define the type of measurements to be performed, wafer attributes, site layouts, acceptance limits and the measurement pattern. This pattern can be a full scan, a fixed-point or user-defined based on your requirements. Edge exclusion is programmable. Each recipe is identified by a distinctive name chosen by the creator and stored for later use.</p> <p>Lots to be processed are created by entering a unique lot name and selecting a recipe from a pull-down menu. Once created, a lot is processed by a single mouse click.</p> <p>Measurement results are summarized and wafer plots are displayed after each wafer is measured. Views of the wafer plots can be customized in a variety of ways to assist you in examining the data. Whether it's the median surface, the thickness variation across the wafer or one of the other wafer plots, it can be rotated and tilted to get an image from any perspective. The amount of detail can be varied by zooming in or out as well.</p> <p>Once a lot is completed, the data is stored in a file, which can be retrieved in the data log function. Results can be displayed in full color graphics as well as tabular form. Additionally, the data can be exported in Excel or Lotus formats. An optional software package allows the system and data to be accessed remotely via the Ethernet. Remote recipe editing, creation, system administration and data review are all available with this function. </p> <p>The AutoScan 200… The choice for high volume production measurements.</p> <p>If high volume is not a necessity, perhaps the Proforma 300 series or the Proforma 200SA semi-automated model may be a more appropriate choice.</p>

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MTI Instruments Inc.
325 Washington Avenue Extension
Albany, NY 12205-5505 USA
Phone: 518-218-2550
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