Mechanical Technology, Incorporated

ACCUMEASURE | Analog Capacitance Sensor

Undoubtedly an essential measurement tool for process automation, quality control and tool automation control.

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Ultra-high Precision Capacitive gap or displacement measurement gauge offering nanometer accuracy and stability.

Accumeasure System 9000 is a high-resolution, capacitance-based instrument that provides the perfect solution to many previously unattainable measurement applications. Rapid response time and extremely low noise levels make it ideal for critical measurements of targets such as:

X-Y stage position
• sheet metal thickness
• semiconductor wafer thickness
• rotating shaft run out and other metrology measurements

The AS-9000 delivers nanometer level resolution for ultra-high-precision measurements
- each and every time.
Lightweight. Compact. Fast and Easy Setup.

ACCUMEASURE | Analog Capacitance Sensor

What Capacitance Gauges Offer:

  • Stability
  • Accuracy
  • Repeatability

Why specify MTI Instruments?

  • Integrated Thickness output 
  • Extremely high resolution amplifiers
  • Precise reliable, non-contact measurements
  • Cost effective (less expensive than laser interferometer with equivalent performance) 


  • Offset/gain controls
  • Self contained globally compatible power supply
  • Integral summing amplifier for thickness output
  • Three outputs 0-10 V dc output jacks
  • 2 CH + Thickness
  • Bar graph display, Optional digital displays available

Ask about adding Master/Slave switch to amplifier for multiple ampifer synchronization, if required.

Required Accessories

Capacitance Probe

MTI offers probes for grounded targets using single-ended probes and for ungrounded or poorly grounded targets using push/pull probes.

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If your application requires large volume sensors Click Here for Custom Solutions

Technology Principles

At MTI Instruments, we offer advanced sensing and physical measurement technology in products that range from basic sensors to complete, fully integrated measurement systems.

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If your application requires large volume sensors Click Here for Custom Solutions

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We make every effort, if feasible, to maintain, service and support our legacy products.