Mechanical Technology, Incorporated

Capacitance Probe

Undoubtedly an essential measurement tool for process automation, quality control and tool automation control.

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High resolution capacitance probes

MTI offers probes for grounded targets using single-ended probes and
for ungrounded or poorly grounded targets using push/pull probes.
Capacitance Probe

Single-ended Probes for Grounded Targets Provide Stable and Precise Non-Contact Measurement with Nanometer Resolution

Standard capacitive sensors require the target to be electrically grounded. Current flows from the probe face to the target and back to the amplifier to complete the circuit. The capacitance between probe and target is proportional to the distance and converted to a 0 - 10V output from the amplifier. The measurement of electrically grounded targets can be, however, affected by changes in the electrical conductivity or ground path of the target.
Capacitance displacement for grounded target

Push/Pull Capacitance Probes for Ungrounded Targets or Poorly Grounded Targets

To eliminate the effects of these variations, MTII developed a unique version of the Accumeasure sensor called the push-pull. In this design each probe consists of two capacitance sensors, built into one probe body. Each sensor is driven at the same voltage, however, there is a
180 degree phase shift between signals. This shift allows the current path to travel across the target surface rather than through the target to ground, eliminating any inaccuracies created by poorly grounded targets. Additionally, highly resistive targets can be measured with this technology allowing capacitance sensors to be used on semi-insulating and semi-conducting targets.
for ungrounded targets


  • Cable and Probe Temperature Rating: -130°C (-202°F) to 200°C (392°F) Cryogenic and higher temperature probes are available up to 1200°C consult MTI Factory. A BNC to SMA adapter is required
  • Connector Temperature Rating: -65°C (-85°F) to 85°C(185°F)
  • Accuracy1: ±0.01% FSR or better, of range when probe and amplifier are calibrated to a known standard at x1 Range extension.
  • Probe and Cable Interchangeability: Accurate to within ± 0.2% at x1 range extension without recalibration
  • Pressure Rating Standard: 1400kPa (200 psig)
  • Material: Stainless steel construction, no active internal electronics
  • Highly flexible Cable for ILR/ILA/PSR Probes: 1m (3.28') length - see options for extension cables. Connector type probes require selection of cable assembly upon ordering

Required Accessories

ACCUMEASURE | Analog Capacitance Sensor

Accumeasure System 9000 is a high-resolution, capacitance-based instrument that provides the perfect solution to many previously unattainable measurement applications. Rapid response time and extremely low noise levels make it ideal for…

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ACCUMEASURE | Capacitance Board for OEMs

The Accumeasure MicroCap is a compact, custom designed, OEM capacitance system for high-precision non-contact gap measurement. It provides exceptional value and offers sub-nanometer resolution, extreme stability, exceptional repeatability, and…

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ACCUMEASURE | Modular Capacitance Rack System

The Accumeasure TM 500 compact capacitance rack system accepts up to 6 capacitance amplifiers. Select from the standard AS-563 (for grounded targets) or the proprietary push/pull AS-562 (ungrounded targets) in any combination.…

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ACCUMEASURE | Digital Capacitance Sensor

The Accumeasure D series amplifier is a truly new revolutionary design that uses the latest technology to convert a highly reliable capacitive electric field measurement (displacement) directly into a highly precise 24 bit digital reading. The…

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If your application requires large volume sensors Click Here for Custom Solutions

Technology Principles

At MTI Instruments, we offer advanced sensing and physical measurement technology in products that range from basic sensors to complete, fully integrated measurement systems.

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If your application requires large volume sensors Click Here for Custom Solutions