Mechanical Technology, Incorporated - Semiconductor Metrology System
Semiconductor Metrology System | Mechanical Technology, Incorporated (MKTY)
Semiconductor wafer metrology for bow, thickness, TTV and flatness. Wafer range: 76mm to 300mm.
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Mechanical Technology, Incorporated

Semiconductor Metrology System

Undoubtedly an essential measurement tool for process automation, quality control and tool automation control.

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Thickness and Bow of all wafer materials including Silicon, Gallium-Arsenide, Indium-Phosphide and sapphire or tape

The Proforma 300i wafer thickness gage is a capacitance based, differential measurement system that performs non-contact thickness measurements of semiconducting and semi-insulating wafers. By utilizing MTI Push/Pull technology, the Proforma 300i does not require the wafers to have a consistent electrical ground resulting in exceptional accuracy and repeatability for most wafer types. The Proforma 300i system includes full remote control operating software and Ethernet network interface capability.

*Gallium-Arsenide requires probe reconfiguration for semi-insulating materials over 10K-Ohm cm bulk resistance
Semiconductor Metrology System


  • Front USB port enables easy data storage to flash drives
  • MTI Instruments' Proprietary Capacitance Circuitry for Outstanding Accuracy and Dependability
  • Non-contact Measurements
  • 76-300 mm Diameter Wafer Range
  • Optional wafer measurement rings
  • Wafer stops for exact centering
  • Ethernet interface
  • Full remote control software (Windows compatible)
  • Optional calibration wafers

If your application requires custom sensors Click Here for Custom Solutions

Technology Principles

At MTI Instruments, we offer advanced sensing and physical measurement technology in products that range from basic sensors to complete, fully integrated measurement systems.

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If your application requires custom sensors Click Here for Custom Solutions

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