Semiconductor Metrology Systems

PROFORMA SERIES

Fully automated wafer characterization system for measuring thickness, TTV, bow, warp, bulk resistivity, site and global flatness. The Proforma AutoScan 200 features pick and place robotics, laser cassette scanning, auto-sensing cassette stands for wafers 75 - 200 mm diameter, and a modular design for easy upgrades.

Fully Automated Wafer Measurement System for Semiconducting and Semi-insulating Materials

Based on MTI's exclusive Push-Pull capacitance technology, the AutoScan 200 delivers full wafer surface scanning with throughputs of up to 100 wafers per hour. The Autoscan provides highly accurate, repeatable measurements of both semiconducting and semi-insulating wafers from 75 mm to 200 mm in diameter. User-defined and ASTM/SEMI scan patterns are used to generate full 3-dimensional wafer images. To improve system upgradability and ease of service, the AutoScan takes full advantage of its modular design. Optional equipment is quickly and easily installed, maximizing system uptime.

Versatile Standard Features

The AutoScan 200 comes standard with two cassette stands that can be defined as input or output stations. An additional cassette stand is also available for greater capacity or wafer sorting. The Class 10 compatible pick and place robotic handling system is equipped with laser cassette scanning for non-contact detection of empty slots, crossovers and broken wafers. The integrated wafer pre-aligner is capable of detecting all SEMI standard notches and flats. To maximize available space, the AutoScan 200 is designed to deliver maximum capability with a minimal footprint. The Windows NT® -based controller PC built into the system offers three levels of security, from a production environment to full engineering analysis of wafer geometry. An on-board RJ-45 connector enables easy data transfer to any network, while an integrated Iomega ® zip drive adds data storage and backup capability.

Measurements

Thickness. TTV.
Bow.
Warp.
Resistivity.
Site and Global Flatness

Advantages

Outstanding Accuracy.
Integrated Design.

Slicing

Saw set-up

Thickness
TTV

Degradation monitoring

Wire guide re-grooving
Blade replacement

Lap/etch and polishing

Process monitoring
Thickness
TTV
Material removal
Bow
Warp
Flatness

Backgrind

Removal rate

Final Inspection

Lot sampling
Final thickness

Exclusive MTI Instruments capacitance sensors.
Measures all materials including Si, GaAs, Ge, InP, SiC.
100 wafers/hour throughput.
Integrated control PC.
Modular design for future upgrades.
Enclosed environment for Class 10 compatibility.
SEMI S2-0200 health and safety compliant design.
SEMI S8-0999 ergonomic compliant design.
Integrated casters and leveling feet for portability.
Optional laser OCR mark reading and resistivity module.

Precision Measurement Instruments

Integrated Measurement Solutions

Laser Triangulation Systems

Fiber Optic Measurement Systems

Capacitance Measurement Systems

Precision Signal Source/Function Generator

Eddy Current and Inductive Systems

Calibration and Fixturing

Semiconductor Metrology Systems

Aviation & Industrial Vibration Measurement Systems

A note about
forward looking statements

Forward-looking Statements: The statements contained on this website which are not purely historical are forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995, including statements regarding the Company's beliefs, expectations, hopes or intentions regarding the future. Forward-looking statements on this website also include statements regarding any financial forecasts or market growth predictions. The Company assumes no obligation to update any forward-looking statement. It is important to note that actual outcomes and the Company's actual results could differ materially from those in such forward-looking statements. Factors that could cause actual results to differ materially include risks and uncertainties such as for example: the Company's need for additional financing, MTI Micro's ability to successfully develop direct methanol micro fuel cells (DMFCs), competition from other products and companies, market and OEM acceptance of DMFCs and the company's other products, early termination of MTI Micro's relationship with The Gillette Company, regulatory risks related to carrying methanol in the passenger compartment of airplanes, and the Company's ability to successfully introduce new products and maintain a technical advantage over its competitors. Readers should also refer to the risk disclosures outlined in the Company's filings with the Securities and Exchange Commissions on Forms 10-K and 10-Q.

Use of Site: Mechanical Technology Inc., MTI Micro and MTI Instruments authorize you to view and download the materials at the Mechanical Technology, MTI Micro and MTI Instruments websites only for your personal, non-commercial use. You may not modify the materials at these websites in any way or reproduce or publicly display, perform or distribute or otherwise use them for any public or commercial purpose.

User Submittals: All submittals to the Mechanical Technology, MTI Micro and MTI Instruments website are considered non-confidential, and are not user protected.

Links to other websites: Mechanical Technology, MTI Micro and MTI Instruments bear no responsibility for the content or claims made on other websites to which the Mechanical Technology, MTI Micro and MTI Instruments websites may be linked. Links made from the Mechanical Technology, MTI Micro and MTI Instruments sites to other sites should not be construed as an endorsement of the products and services offered on those sites.

General disclaimers: Mechanical Technology, MTI Micro and MTI Instruments provide no guarantees as to the accuracy or completeness of the materials on the Mechanical Technology, MTI Micro and MTI Instruments websites, and disclaim any liability for damages suffered by users. The Company also disclaims responsibility for site access in countries where the contents of this site are illegal, or where access is prohibited.

MTI Instruments Inc.
325 Washington Avenue Extension
Albany, NY 12205-5505 USA
Phone: 518-218-2550
Toll Free (US): 800-342-2203
Fax: 518-218-2506
E-mail:

Automated Wafer Thickness Inspection Metrology, Computerized Robotic Automated Precision Semiconductor Wafer Thickness/Surface Gaging, Non-contact Wafer Resistivity Measurement, GaAs Gallium-Arsenide Surface Scanning Machine, TTV Measurement Gage, Noncontact Measuring, mil/mils, microinch/microinches, micron/microns, mm, millimeter/millimeters