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Semiconductor Metrology Systems

A complete line of non-contact measurement systems for the semiconductor industry. From manual to fully automated systems, the Proforma line of metrology tools are ideal for measuring thickness, bow, warp, resistivity, site and global flatness for all wafer materials.

Proforma Autoscan 200

Proforma Autoscan 200

Fully automated wafer characterization system for measuring thickness, TTV, bow, warp, bulk resistivity, site and global flatness. The Proforma AutoScan 200 features pick and place robotics, laser cassette scanning, auto-sensing cassette stands for wafers 75 - 200 mm diameter, and a modular design for easy upgrades.
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Proforma 300SA

Proforma 300SA

Semi-automated wafer characterization system for measuring wafer thickness, TTV, bow warp, site and global flatness. The Proforma 300SA can be used for all wafer materials and accommodates 200mm and 300mm wafer diameters
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Proforma 200SA

Proforma 200SA

Semi-automated, full wafer surface scanning for thickness, TTV, bow, warp, site and global flatness. The Proforma 200SA can be used for all wafer materials and accommodates wafer diameters of 75 - 200 mm.
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Proforma 300

Proforma 300

Manual, non-contact measurement of wafer thickness, TTV and bow. Portable and easy to set-up, the Proforma 300/G measures all wafer materials including Silicon, Gallium-Arsenide, Indium-Phosphide and wafers mounted to sapphire or tape.
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PV-1000

PV-1000

High-speed, multi-channel thickness, TTV and bow measurement module for in-process monitoring of solar/photovoltaic wafers and other materials.
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MTI Instruments Inc.
325 Washington Avenue Extension
Albany, NY 12205-5505 USA
Phone: 518-218-2550
Toll Free (US): 800-342-2203
Fax: 518-218-2506
E-mail:

Automated/Tabletop or Robotic Wafer Thickness Inspection Metrology, Computerized Precision Semiconductor Wafer Thickness Gaging, Non-contact Wafer Surface Measurement, Silicon/GaAs/Gallium-Arsenide Wafers, Surface Scanning Equipment, TTV Measurement Gage, Electronic Noncontact Measuring Thickness of Wafers Systems/Equipment, mil/mils, microinch/microinches, micron/microns, mm, millimeter/millimeters, Photovoltaic wafer measurement, PV wafer measurement