Capacitance Probe

Capacitance Probe 2017-10-17T07:31:15+00:00

Capacitance Probe

Undoubtedly an essential measurement tool for process automation, quality control and tool automation control.

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MTI offers probes for grounded targets using single-ended probes and
for ungrounded or poorly grounded targets using push/pull probes.

 

Single-ended Probes for Grounded Targets Provide Stable and Precise Non-Contact Measurement with Nanometer Resolution

Standard capacitive sensors require the target to be electrically grounded (for position, gap and vibration measurement applications). Current flows from the probe face to the target and back to the amplifier to complete the circuit. The capacitance between probe and target is proportional to the distance and converted to a 0 – 10V output from the amplifier. The measurement of electrically grounded targets can be, however, affected by changes in the electrical conductivity or ground path of the target.

Capacitance displacement for grounded target

 

Push/Pull Capacitance Probes for Ungrounded Targets or Poorly Grounded Targets

To eliminate the effects of these variations, MTII developed a unique version of the Accumeasure sensor called the push-pull. In this design each probe consists of two capacitance sensors, built into one probe body. Each sensor is driven at the same voltage, however, there is a 180 degree phase shift between signals. This shift allows the current path to travel across the target surface rather than through the target to ground, eliminating any inaccuracies created by poorly grounded targets. Additionally, highly resistive targets can be measured with this technology allowing capacitance sensors to be used on semi-insulating and semi-conducting targets (for position, gap and vibration measurement applications).

for ungrounded targets

Features

  • Cable and Probe Temperature Rating: -130°C (-202°F) to 200°C (392°F) Cryogenic and higher temperature probes are available up to 1200°C consult MTI Factory. A BNC to SMA adapter is required
  • Connector Temperature Rating: -65°C (-85°F) to 85°C(185°F)
  • Accuracy1: ±0.01% FSR or better, of range when probe and amplifier are calibrated to a known standard at x1 Range extension.
  • Probe and Cable Interchangeability: Accurate to within ± 0.2% at x1 range extension without recalibration
  • Pressure Rating Standard: 1400kPa (200 psig)
  • Material: Stainless steel construction, no active internal electronics
  • Highly flexible Cable for ILR/ILA/PSR Probes: 1m (3.28′) length – see options for extension cables. Connector type probes require selection of cable assembly upon ordering

Model Specifications

Product Info Technical Specifications
P/N Model Measurement Range Accuracy Min. Range Stand-Off Resolution Spot Size Interface Type Request Info
8100-0001-000 Capacitance Probe: ASP-25M 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 10x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-25M
8100-0002-000 Capacitance Probe: ASP-50M 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 9x @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm(0.119µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-50M
8100-0003-000 Capacitance Probe: ASP-125M 125µm (5mil/s) 6.35µm (0.25mil/s) Max. Range Extension: 10x @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-125M
8100-0004-000 Capacitance Probe: ASP-250M 250µm (10mil/s) 12.7µm (0.5mil/s) Max. Range Extension: 3x @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-250M
8100-0005-000 Capacitance Probe: ASP-500M 500µm (20mil/s) 25.4µm (1mil/s) Max. Range Extension: 4x @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-500M
8100-0006-000 Capacitance Probe: ASP-1250M 1250µm (50mil/s) 63.5µm (2.5mil/s) Max. Range Extension: 2x @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-1250M
8100-0007-000 Capacitance Probe: ASP-2500M 2500µm (100mil/s) 127µm (5mil/s) Max. Range Extension: 2x @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-2500M
8100-0008-000 Capacitance Probe: ASP-5000M 5000µm (200mil/s) 254µm (10mil/s) Max. Range Extension: 2x @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) SMA connector CTA Request Infomation on Capacitance Probe: ASP-5000M
8100-1001-000 Capacitance Probe: ASP-25M 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 10x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-25M
8100-1002-000 Capacitance Probe: ASP-50M 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 9x @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-50M
8100-1003-000 Capacitance Probe: ASP-125M 125µm (5mil/s) 6.35µm (0.25mil/s) Max. Range Extension: 10x @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-125M
8100-1004-000 Capacitance Probe: ASP-250M 250µm (10mil/s) 12.7µm (0.5mil/s) Max. Range Extension: 9x @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-250M
8100-1005-000 Capacitance Probe: ASP-500M 500µm (20mil/s) 25.4µm (1mil/s) Max. Range Extension: 3x @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-500M
8100-1006-000 Capacitance Probe: ASP-1250M 1250µm (50mil/s) 63.5µm (2.5mil/s) Max. Range Extension: 2x @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-1250M
8100-1007-000 Capacitance Probe: ASP-2500M 2500µm (100mil/s) 127µm (5mil/s) Max. Range Extension: 2x @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-2500M
8100-1008-000 Capacitance Probe: ASP-5000M 5000µm (200mil/s) 254µm (10mil/s) Max. Range Extension: 2x @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) SMA connector CTR Request Infomation on Capacitance Probe: ASP-5000M
8100-2001-410 Capacitance Probe: ASP-25M 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 9x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-25M
8100-2002-410 Capacitance Probe: ASP-50M 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 4x @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-50M
8100-2003-410 Capacitance Probe: ASP-125M 125µm (5mil/s) 6.35µm (0.25mil/s) Max. Range Extension: 2x @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-125M
8100-2004-410 Capacitance Probe: ASP-250M 250µm (10mil/s) 12.7µm (0.5mil/s) Max. Range Extension: 2x @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-250M
8100-2005-410 Capacitance Probe: ASP-500M 500µm (20mil/s) 25.4µm (1mil/s) Max. Range Extension: 2x @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-500M
8100-2006-410 Capacitance Probe: ASP-1250M 1250µm (50mil/s) 63.5µm (2.5mil/s) Max. Range Extension: 2x @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-1250M
8100-2007-410 Capacitance Probe: ASP-2500M 2500µm (100mil/s) 127µm (5mil/s) Max. Range Extension: 2x @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-2500M
8100-2008-410 Capacitance Probe: ASP-5000M 5000µm (200mil/s) 254µm (10mil/s) Max. Range Extension: 2x @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) SMA connector ILA Request Infomation on Capacitance Probe: ASP-5000M
8100-3001-410 Capacitance Probe: ASP-25M 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 9x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-25M
8100-3002-410 Capacitance Probe: ASP-50M 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 4x @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-50M
8100-3003-410 Capacitance Probe: ASP-125M 125µm (5mil/s) 6.35µm (0.25mil/s) Max. Range Extension: 2x @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-125M
8100-3004-410 Capacitance Probe: ASP-250M 250µm (10mil/s) 12.7µm (0.5mil/s) Max. Range Extension: 2x @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-250M
8100-3005-410 Capacitance Probe: ASP-500M 500µm (20mil/s) 25.4µm (1mil/s) Max. Range Extension: 2x @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-500M
8100-3006-410 Capacitance Probe: ASP-1250M 1250µm (50mil/s) 63.5µm (2.5mil/s) Max. Range Extension: 2x @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-1250M
8100-3007-410 Capacitance Probe: ASP-2500M 2500µm (100mil/s) 127µm (5mil/s) Max. Range Extension: 2x @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-2500M
8100-3008-410 Capacitance Probe: ASP-5000M 5000µm (200mil/s) 254µm (10mil/s) Max. Range Extension: 2x @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) SMA connector ILR Request Infomation on Capacitance Probe: ASP-5000M
8100-4001-410 Capacitance Probe: ASP-25M 25µm (1mil/s) 1.27µm (0.05mil/s) Max. Range Extension: 9x @50Hz: 0.2nm (0.008µin) – @5kHz: 1.5nm (0.06µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-25M
8100-4002-410 Capacitance Probe: ASP-50M 50µm (2mil/s) 2.54µm (0.1mil/s) Max. Range Extension: 4x @50Hz: 0.3nm (0.012µin) – @5kHz: 3nm (0.119µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-50M
8100-4003-410 Capacitance Probe: ASP-125M 125µm (5mil/s) 6.35µm (0.25mil/s) Max. Range Extension: 2x @50Hz: 0.8nm (0.032µin) – @5kHz: 7.5nm (0.296µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-125M
8100-4004-410 Capacitance Probe: ASP-250M 250µm (10mil/s) 12.7µm (0.5mil/s) Max. Range Extension: 2x @50Hz: 1.5nm (0.06µin) – @5kHz: 15nm (0.591µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-250M
8100-4005-410 Capacitance Probe: ASP-500M 500µm (20mil/s) 25.4µm (1mil/s) Max. Range Extension: 2x @50Hz: 3nm (0.119µin) – @5kHz: 30nm (1.182µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-500M
8100-4006-410 Capacitance Probe: ASP-1250M 1250µm (50mil/s) 63.5µm (2.5mil/s) Max. Range Extension: 2x @50Hz: 7.5nm (0.296µin) – @5kHz: 75nm (2.953µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-1250M
8100-4007-410 Capacitance Probe: ASP-2500M 2500µm (100mil/s) 127µm (5mil/s) Max. Range Extension: 2x @50Hz: 15nm (0.591µin) – @5kHz: 150nm (5.906µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-2500M
8100-4008-410 Capacitance Probe: ASP-5000M 5000µm (200mil/s) 254µm (10mil/s) Max. Range Extension: 2x @50Hz: 30nm (1.182µin) – @5kHz: 301nm (11.851µin) SMA connector PSR Request Infomation on Capacitance Probe: ASP-5000M
8200-2104-420 PP Probe: ASP-250MD-ILA/PP 250µm (10mil/s) 0.02% FSR 25µm (1mil/s) 9.45 mm SMA connector Request Infomation on PP Probe: ASP-250MD-ILA/PP
8200-2114-420 PP Probe: ASP-250MD-ILA/PP Ext 250µm (10mil/s) 0.02% FSR 25µm (1mil/s) 11.58 mm SMA connector Request Infomation on PP Probe: ASP-250MD-ILA/PP Ext
8200-3104-420 PP Probe: ASP-250MD-ILR/PP 250µm (10mil/s) 0.02% FSR 25µm (1mil/s) 7.11 mm SMA connector Request Infomation on PP Probe: ASP-250MD-ILR/PP
8200-2109-420 PP Probe: ASP-350MD-ILA/PP 350µm (14mil/s) 0.02% FSR 35µm (1.4mil/s) 11.58 mm SMA connector Request Infomation on PP Probe: ASP-350MD-ILA/PP
8200-2003-420 PP Probe: ASP-125MR-ILA/PP 125µm (5mil/s) 0.02% FSR 12.5µm (0.5mil/s) 7.42 mm SMA connector Request Infomation on PP Probe: ASP-125MR-ILA/PP
8200-2004-420 PP Probe: ASP-250MR-ILA/PP 250µm (10mil/s) 0.02% FSR 25µm (1mil/s) 10.26 mm SMA connector Request Infomation on PP Probe: ASP-250MR-ILA/PP
8200-2014-420 PP Probe: ASP-250MR-ILA/PP Ext 250µm (10mil/s) 0.02% FSR 25µm (1mil/s) 12.83 mm SMA connector Request Infomation on PP Probe: ASP-250MR-ILA/PP Ext
8200-2005-420 PP Probe: ASP-500MR-ILA/PP 500µm (20mil/s) 0.02% FSR 50µm (2mil/s) 16.15 mm SMA connector Request Infomation on PP Probe: ASP-500MR-ILA/PP
Not finding what you’re looking for? MTI offers custom solutions More Info About MTI’s Custom Solutions

Industries & Applications For This Product

Industry Measurement Type Applications
Consumer Electronics Positioning Height Gap of inkjet printers
Consumer Electronics Thickness Glass Thickness
Automotive Surface Brake Rotors

Required Accessories

Brochures

For Grounded Targets
For unGrounded Targets
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Accessories

P/N Image Model Product Description
8000-6890 SMA-Female to BNC-Male (8000-6890) Image SMA-Female to BNC-Male For connecting Digital Series probes to MTI analog Amplifiers
8000-6891-410 SMA-Female to SMA-Male (8000-6891-410) Image SMA-Female to SMA-Male Extension Cables, 1 meter
8000-6891-420 SMA-Female to SMA-Male (8000-6891-420) Image SMA-Female to SMA-Male Extension Cables, 2 meters
8000-6891-440 SMA-Female to SMA-Male (8000-6891-440) Image SMA-Female to SMA-Male Extension Cables, 4 meters
8000-6952 KD-CH4D (8000-6952) Image KD-CH4D Precision fixture that secures capacitance probes sensor and accurately varies the position of a target relative to the sensor. It provides an excellent means of obtaining calibration data at the user’s facility.

Technology Principles

At MTI Instruments, we offer advanced sensing and physical measurement technology in products that range from basic sensors to complete, fully integrated measurement systems.

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Where to Buy
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If your application requires custom sensors
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